Analysis and treatment of common error codes of Noy helium mass spectrometer leak detector

10

Too many repeated evacuation times during standard leakage testing

1: The pressure at the leak detection port cannot be pumped down, the leak detection port is not properly connected or there is a fault with the leak hole.

2: Valve V2 is not opened or not fully opened.

1: Check for large leaks at the leak detection port and test the leak holes.

2: Check Valve V2.

16

Startup timeout

The molecular pump cannot be powered on normally.

Check the molecular pump.

20

Anode high voltage error

The lamp board detects an error in the anode voltage of the ion source.

Inspect the anode power supply, ion source cable, and filament board.

21

Emission current is low

The lamp board detects a low emission current of the ion source.

Press the stop button and restart.

22

Emission current is high

The lamp board detects a high emission current of the ion source.

Press the stop button and restart.

23

Lamp board 24V fault

The 24V voltage of the lamp board is abnormal.

Inspect the lamp board.

24

80V voltage fault

The 80V voltage of the lamp board is abnormal.

Inspect the lamp board.

26

Molecular pump is not ready

The molecular pump has not been started up completely.

Check the fore-vacuum and judge according to the molecular pump itself.